Pellicle frame, pellicle and method for using pellicle frame

表膜构件框体、表膜构件和表膜构件框体的使用方法

Abstract

本发明提供表膜构件框体、表膜构件和表膜构件框体的使用方法。在将表膜铺展并粘接在表膜构件框体上时框体不会变形,此外在将表膜构件粘贴在掩模上后,表膜构件框体自身也能追随掩模因自重而产生的挠曲。表膜构件框体为矩形,该表膜构件框体的应变度α为0.06%以下,下述通用式(1)所示的该表膜构件框体的各边的追随度β为3mm以上,该表膜构件框体的长边的追随度β为32mm以下,且框体的长边长度为1400mm~2100mm,并且该表膜构件框体的内侧面积为15000cm2以上。β=(1/表膜构件的挠曲量)×厚度×宽度(1)。
Provided is a pellicle frame wherein the frame is not distorted when a pellicle film is stretched and pasted, and the pellicle frame itself follows up flexure caused by the weight of a mask even after a pellicle is pasted to the mask. A rectangular pellicle frame has a distortion factor a of 0.06% or less, the followability ss of each side of the pellicle frame expressed by the general expression (1) is 3 mm or more, the followability ss of the long side of the pellicle frame is 32 mm or less, the long side of the pellicle frame has a length of 1400-2100 mm, and the area on the inside of the pellicle frame is 15000 cm2 or more. ss=(1/flexure of pellicle)thicknesswidth (1).

Claims

Description

Topics

Download Full PDF Version (Non-Commercial Use)

Patent Citations (0)

    Publication numberPublication dateAssigneeTitle

NO-Patent Citations (0)

    Title

Cited By (0)

    Publication numberPublication dateAssigneeTitle